- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/48 - Ion implantation
Patent holdings for IPC class C23C 14/48
Total number of patents in this class: 583
10-year publication summary
39
|
45
|
77
|
56
|
52
|
46
|
35
|
28
|
37
|
11
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Varian Semiconductor Equipment Associates, Inc. | 1282 |
53 |
Applied Materials, Inc. | 16587 |
31 |
Axcelis Technologies, Inc. | 429 |
27 |
Lintec Corporation | 1915 |
26 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
19 |
Entegris, Inc. | 1736 |
17 |
Quertech Ingenierie | 32 |
17 |
ION Beam Services | 33 |
11 |
Richview Electronics Co., Ltd. | 20 |
11 |
Sumitomo Electric Industries, Ltd. | 14131 |
8 |
Praxair Technology, Inc. | 1367 |
8 |
Agc, Inc. | 4029 |
8 |
AGC Glass Europe | 1049 |
7 |
Sumitomo Heavy Industries ION Technology Co., Ltd. | 96 |
7 |
Intevac, Inc. | 127 |
6 |
IONICS France | 12 |
6 |
Seagate Technology LLC | 4228 |
5 |
Commissariat à l'énergie atomique et aux energies alternatives | 10525 |
5 |
AGC Flat Glass North America, Inc. | 202 |
5 |
Alpha Tau Medical Ltd. | 73 |
5 |
Other owners | 301 |